342mm Susceptor Compatible Vacuum Aligner SVAL30D1 Series
It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.
The 342mm Susceptor-Compatible Vacuum Aligner SVAL30D1 series enables high-speed and high-precision positioning of susceptors (such as compound semiconductors and silicon wafers) in a vacuum environment using a gripping method. By placing the positioning sensor in the vacuum environment, installation can be completed with just the main unit, increasing the design flexibility of the equipment. For more details, please contact us or refer to the catalog.
- 企業：ジェーイーエル
- 価格：Other
